Email: info@bec-sales.com
Tel: 408 624 1222
Atomic Layer Deposition
Lab Systems
Infinity P400
Infinity flex 400
Infinity W200
ATOMIC LAYER DEPOSITION (ALD) FOR ULTRABARRIER ENCAPSULATION


Disruptive Thin Film Deposition Technology Producing Unsurpassed Ultrabarriers for Next Level Durability.


 

The successful introduction of new energy saving and energy generating devices such as OLED lighting , CIGS on flexible substrate or organic photovoltaics and next generation microelectronic devices hinges on the availability of an industrial technology for creating an affordable ultrabarrier, protecting the component from moisture absorption during operation, hence ensuring its durability and reliability.

In addition, traditional polymer and silicone materials are falling short of delivering the required reliability performance, and suffer from UV-induced degradation

For more information call us: 408 624 1222
 

Flex Substrate OLED Display (UltraBarrier Thin Film Coating)Flex Substrate OLED Display (UltraBarrier Thin Film Coating)Industrial Glass (ALD UltraBarrier Thin Film Coating)Wafer Substrate OLED Display(ALD Thin Film Coating)Glass Substrate Solar CIGS Panel(Atomic Layer Deposition Thin Film Coating)Hard Disk Drive Recording Head (Poles & Gaps, Atomic Layer Deposition Encapsulation)


The ENCAPSULIX, SAS patented Atomic Layer Deposition  (ALD) solution

Ultrabarriers as a path to 20yr to 40yr lifetimes

  • An unparalleled diffusion barrier
  • Patented Injector, dosing system and chamber configuration
  • Solves the corrosion issue by protecting the component from moisture absorptionEncapsulix, SAS patented Atomic Layer Depositon
  • Geometrically scalable process from prototype to production. 200mm through to Gen 5.5 plus
  • Creates coverage over large area electronics
  • Ultrabarrier ALD encapsulation brings durability to unsurpassed levels
  • Economically reduce costs and improve production throughputs
  • Atomic Layer Deposition Cycle 4 to 20+ times faster than competition
  • Superior Cost Of Ownership
  • Encapsulix has a dedicated development and applications lab to address the geometric scaling
    of critical ALD requirements for industrial  & microelectronic devices and foils.
  • Process focus is in thin Al2O3, ZnO, TiO2 specifically for barrier coatings.
  • Dual sided atomic layer deposition for web coating
  • Different ALD systems for specialized industries (See below)
  • Integrates onto standard cluster central handlers
  • Industry validated barrier film performance

“ Encapsulix (Simiane, Provence, France) – Developer of thin- film coating equipment that make OLED, LED lighting, photovoltaics, organic electronics more durable and less expensive to manufacture.”   St. Gobain, October 2012


Aplications for ENCAPSULIX ATOMIC LAYER DEPOSITION

  • OLED Displays
  • OLED Lightning
  • Photovoltaic
  • Data storage
  • MEMS
  • Industrial Films and Glass

logo of encapsulix

 


Encapsulix Product Solutions for Ultrabarrier Encapsulation



labsystem
    LAB SYSTEM


Laboratory System

General R&D, Polymers, CIGS, O PV, OLED
 


infinity 400
   INFINITY P400


Pallet, glass plate

200 mm x 500 mm pallets
General R&D Smart Card, Sheet to sheet, Si PV,..
 

infinity flex 400
  INFINITY FLEX 400


Roll to roll web system for advanced R& D, pilot production (14’’web)

Polymers, CIGS flex, O PV flex, OLED flex
 


infinity w200
   INFINITY W200


MESC Cluster  Tool for  200mm  wafer , extendable to 450mm (2013)

General R&D,MEMS, Semi, Hard Disk Drive

 



Infinity P400 Ald System for robust and uniform filmsInfinity P400 ALD System for Robust and Uniform Films

ALD System 200mm x 430mm

2% uniformity optimized for minimal TMA consumption (range over mean) across 400mm. Reaction chamber and hence substrate can be enlarged from this Gen 2 format to Gen 5.5 and beyond.

Patented ALD technology allows for superior film performance, Cost of Ownership and geometric scalability.

For more information call us: 408 624 1222
 

 

Critical Performance, Variable Form Substrates

WVRT performance

WVTR

 

 

10-4
g/m2dy



 

10-5
g/m2dy



 

 

10-6
g/m2dy

Flex Substrate

Flex subtrate for food & medical
Food & Medical
10-1g/m2dy
CIIGS flex
CIGS Flex
 



O-PVOLED light
O-PV               OLED light
 

OLED Display
OLED Display
Wafer

RF MEMS
RF MEMS
 
 


 
 

OLED Micro Display
OLED Micro Display
Glass / Pallet


Printed ElectronicsLow Electrome
Printed Electronics  Low Electrome


CIGS on Glass
CIGS on Glass
 



 

OLED lighting
OLED Lighting

OLED-Display on glass
OLED Display

                  For more information call us: 408 624 1222 or use our contact form