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Introduction

Panacea

Panacea-KP

Tazmaki

brochure

Exaust Gas Abatement Systen
Panacea
Panacea-KP
Tazmaki
Exhaust Gas Abatement Systems


LEADING PROVIDER OF EXHAUST GAS
ABATEMENT SYSTEMS

 

Protecting and preserving the environment for generations from toxic and harmful gases produced by various process technologies and precursor materials used for chip manufacturing  is the  primary motivation for the Tosetz Exhaust Gas Abatement products. With more than 1,000 installations the innovative and eco-friendly  technology  is a testament of the  customers confidence in Tosetz unique products and services.

Exhaust Gas Abatement System Panacea

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Exhaust Gas Abatement Systems


PROVEN LEADERS IN ABATEMENT SYSTEMS

 

Tosetz abatement systems are designed for abatement of toxic effluent exhaust gases from Semiconductor and LCD production tools. They are for the treatment of exhaust gases from CVD, Dry Etcher, Wet Stations, and Wet Stripping Tools, just to name a few.

CL2(SO2) can be abated with this Panacea model.

  • Insolubility CL2 can be abated only with water
  • Wide products variation of (30SLM-3,000SLM)
  • Abate 6,000cc/min of Cl2 gas to concentrations lower than recommended TLV.  
  • Small carried over water is available because gases are abated inside the water in the tank
  • Equipped with counter measures against by-products & easy  maintenance
  • Recycled water can be used
  • No clogging through a patented TOSETZ auto-cleaning system.
Exhaust Gas Abatement System Panacea KP

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Exhaust Gas Abatement Systems


ABATEMENT SYSTEMS FOR HALOGEN CHEMICALS

 

Panacea-KP is for trapping of by-products (powder & chemicals)   generated at process tools.

With high abatement performance for halogen chemicals, it can solve various powder & chemical related problems by installing before or after the burning tool.

  • Extraordinarily high trapping performance of by-products powder
  • Solving inlet clogging problem by automatic cleaning system
  • Wide capacity variation of (30SLM-1,000SLM)
  • Simple design structure & easy maintenance
Exhaust Gas Abatement System Tazmaki

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Exhaust Gas Abatement Systems


BURN SCRUBBERS FOR
PFC GASES

 

Abatement of PFC and Toxic  gases from CVD, Dry Etcher type gases is accomplished by TAZMAKI

The TAZMAKI is a newly developed burn type scrubber, which efficiently abates PFC gases such as CF4, SF6 from Dry Etching and CVD tools.

  • By-products are efficiently trapped by a water scrubber equipped on the system.
  • High efficient burning system with tornado burner
  • Energy saving by idling mode
  • Available for various recipes, flow rates and space for installation
  • Supply of best combination with water treatment system for gas recipes and many kinds of  processes.